International Journal of Nonlinear Sciences and Numerical Simulation

 

Vol. 3, Nos. 3-4 (Special Issue)   2002

 

Proceedings of the International Conference on Micro & Nano Systems 2002 (ICMNS 2002)

August 11~14, 2002, Kunming, China

 

Guest Editors:

Ya-Pu Zhao (CAS, China) and Wen J. Li (CUHK, Hong Kong)

 

International Scientific Advisory Board

Chair:

Zhemin ZHENG (Foreign Associate of NAE, USA, and Member of CAS, China)

Co-Chairs:

Yilong Bai (Member of CAS, China)

 

Chih-Ming Ho (Member of NAE, USA)

 

Mianheng Jiang (Vice-President, CAS, China)

Committee Members: 

R. H. Austin (Princeton, USA)

 

C. L. Bai (CAS, China)

 

D. Cho (SNU, Korea)

 

H. Fujita (Tokyo U, Japan)

 

T. Fukuda (Nagoya U, Japan)

 

C. Joachim (CEMES, France)

 

C. J. Kim (UCLA, USA)

 

N. F. de Rooij (U Neuch., Switzerland)

 

Y. C. Tai (CalTech, USA)

 

W. C. Tang (DARPA, USA)

 

K. L. Wang  (HKUST, Hong Kong)

 

International Program Committee

Chair:          Chunli BAI (CAS, China) 

Co-Chair:      William TANG (USA)

Committee Members:

F. Arai (NgoyaU, Japan)

D. Beebee (UWisconsin, USA)

E. J. Cui (BIA, China)

S. L. Feng (CAS, China)

J. Judy (UCLA, USA)

R. S. W. Lee (HKUST, Hong Kong)

V. G. B. Lee (NCKU, Taiwan)

Z. J. Li (TsinghuaU, China)

L. W. Lin (UCBerkeley, USA)

C. Liu, UIllinois, USA

C. T. C. Nguyen (UMichigan, USA)

O. Solgaard (Stanford, USA)

W. Sun (UNeuchatel, Switzerland)

E. K. Wang (CAS, China)

L. D. Wang (Dalian U of Tech, China)

W.Y. Wang (SIM, CAS, China)

Y. Y.  Wang (PekingU, China)

Z. Y. Wen (ChongqingU, China)

M. Wong (HKUST, Hong Kong)

X. P. Wu  (USTC, China)

Q. J. Xue (LICP, CAS)

S. W. Yu (TsinghuaU, China)

T. X. Yu (HKUST, Hong Kong)

Z. Y. Zhou (TsinghuaU, China)

 

Local Organizing Committee

Chair:   K. H. Sun (CAS, China)

Co-Chair:     Y. H. Liu (CUHK, Hong Kong)

Committee Members:

D. F. Cui (Inst. of Electronics, CAS)

D. N. Fang (TsinghuaU)

J. Fang (Dept. of Mechanics, PekingU)

M. Fu (CAS)

Y. L. Hao (Inst. of Microelectronics, PKU)

Z. D. Jiang (Xian JiaotongU)

Q. G. Meng (NSFC)

H. Qiang (Beijing Inst. of Tech)

S. J. Qin (GuizhouU, China)

Q. P. Sun (HKUST)

J. Tian (Inst. Of Acoustics, CAS)

Y. L. Wang (SIM, CAS)

Z. Y. Wen (ChongqinU)

S. H. Xia, (Inst. of Electronics, CAS)

B. Xiong (SIM, CAS)

X. Y. Ye (TsinghuaU)

D. C. Zhang (Inst. of Microelect. PekingU)

T. Y. Zhang (HKUST)

 

Conference Organizers

 

Conference General Chair: Ya-Pu Zhao, LNM, CAS, China

Conference General Co-Chair: Wen J. Li, CUHK, Hong Kong

　 

Regional Co-Chairs

China: S. L. Feng, CAS, China

America: C. Liu, UIllinois, USA

Asia/Oceania: V. G. B. Lee, NCKU, Taiwan

Europe/Africa: W. Sun, UNeuch, Switzerland  

 

Local Arrangement

Chair: K. H. Sun, CAS, China

Co-Chair: Y. H. Liu, CUHK, Hong Kong  

 

Finance

Chair: Y. Z. Yang, CSTAM, China

Co-Chair: K. Tseng, TsinghuaU, Taiwan  

 

Publicity

Chair: Y. L. Wang, CAS, China

Co-Chair: S. X. Guo, KagawaU, Japan  

 

Publications

Chair: Y. L. Hao, PekingU, China

Co-Chair: Y. K. Lee, HKUST, Hong Kong

　 

Secretariat

Chairs: X. G. Liu, W. Wang, CSTAM, China

Co-Chair:  S. J. Qin CUHK, Hong Kong  

 

Webmaster

H. F. Lam, CUHK, Hong Kong

X. G. Liu, CSTAM, China

 

Responsible Editors: Yazheng Yang, Xiguo Liu, Wei Wang, CSTAM, China

 

CONTENTS

Bio-MEMS

Endothelial Cells: The Living Sensors and Actuators

   Tzung K. Hsiai et al. ...... 169

Bio-Electrochemical Characterization of Micromachined Two-Electrode Cell Sensors

   Xin-Xia Cai et al. ............ 173

Micro Flow Cytometers with Buried SU-8/SOG Optical Waveguides for On-line Cell Counting

   Che-Hsin Lin et al. ............. 177

Enhancing Antitumor Effect of Adriamycin Nanoparticle -Lipiodol Emulsion by Pretreating Tumor Cells with Diethyldithiocarbamate

   Dao-Cheng Wu et al. ........... 181

A Model of Directed Binding to Microtubules by Kinesin and Ncd Motor Proteins

    H. Bolterauer et al. ............. 185

Micro-systems for Optical Protein-Chip

   Gang Jin et al. ................ 191

Design and Fabrication of a Micro Controller Based Glucose Sensor

   Toh Wei Da et al. ............... 195

A Micropipet Aspiration System to Measure the Kinetics of Selectin/Ligand Interactions

   Jun Huang et al. ........... 199

Driven by Electroosmotic Flow (EOF) in Poly (dimethylsiloxane)(PDMS)/Glass

Microchip

   Qiang Zhao et al. ............ 203

Fabrication of Microfluidic Electrocontrolled Chip in Polydimethylsiloxane (PDMS)

   Ming Wang et al. ............ 207

Development and Characterization of DNA Hybridization Reaction on PDMS Microchip

   Xiang Chen et al. ............ 211

MEMS-based Temperature Control Systems for DNA Amplification

   Chia-Yen Lee et al. ............. 215

 

Design and Microfabrication of Biochemical Reaction Chip

   Zhan Zhao et al. ........... 219

The Construction of Layered Architectures of Dendrimers—Adsorption Layers of Amino-terminated Dendrimers on 3-Mercaptoporopionic Acid Self-assembled Monolayer Formed on Au

   Hiroki Nagaoka et al. .............. 223

Perylene Derivative Based Self-Assembled Monolayer on ITO Electrode Surfaces

   Wen-Long Wang et al .......... 229

Analysis of Thermal Cycling in Micro-PCR Chip

   Wei Wang et al. ........... 233

Design and CFD Analysis of the Flow in a Micro-fabricated PCR-Chip for Leukemia Diagnosis

   Qiao-Ling Zheng et al. ............ 237

Medical Image Compression Using Tree-Structured Vector Quantization and Fuzzy C-Means

   Sookpotharom Supot et al. ........... 243

A Two-State Model for the Transport of Molecular Motors

   Tong-Jun Zhao et al. ............ 249

Effective Potential and Efficiency for a Single Brownian Motor

   Yong Zhan et al. ........... 253

Nanostructure of Nacre and Its Mechanical Effects

   Fan Song et al. ........... 257

An experimental investigation of hollow fiber flow in Dialyzer

  Miao Li et al. ................. 261

 

Micro & Nano Systems I

Design and Rapid Fabrication of a Microfluidic Fraction Collector

Bo-Zhi Yang et al. ............ 267

A MEMS Flowmeter for Measuring Very Small Flow Rates

Steve Tung et al. .............. 273

Electrostatic MEMS Planar Fan for Enhancement of Fluid Mixing

Zhi-Chun Ma et al. ............ 277

Preparation of Ultra-Fine Calcium Silicate Powders

Zeng GuiYu et al. ........... 283

A Circular-Type Thermal Flow Direction Sensor with an Integrated Interface Circuit

    Seunghyun Kim et al. ................ 289

Research on a Novel Integrated Pressure Sensor for High Temperature

Wei Zhang et al. ............ 295

Fabrication of Thin Film Vanadium Oxide for Microbolometer

Chen-Kuei Chung et al. ........... 299

An Uncooled Microbolometer Infrared Detector Based on Polycrystalline Silicon

Germanium Thin Film

Liang Dong et al. .............. 303

A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

Zuan-Kai Wang et al. ............. 307

Structural Failure Analysis and Numerical Simulation of Micro-accelerometers under Impulsive Loading

Yu-Qun Hu et al. ............ 311

A Novel Structure of Passive Ring Resonator on Silicon Substrate

Wei Guo et al. ............. 315

Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

Hui-Kai Xie et al. ............ 319

A New Z-axis Silicon Micromachined Vibrating Gyroscope

An-Ping Qiu et al. ........... 325

Micro-machined Rate Gyroscope

Yan Su et al. ............. 329

Simulation of Vibratory Micromachined Gyroscope with Fence Structure

Lu-Feng Che et al. ............. 333

Symmetrical Design and Analysis of a Novel MEMS-based 1ª2 Optical Switch

Cong-Shun Wang et al. ........... 337

Simulation, Optimization and Measurement of MEMS Torsion Micro Mirrors for Optical MEMS Application

Da-Chao Li et al. ........... 341

Optical Alignment Applied for Solving Axis-Misaligned Errors in Micro Electro Mechanical Systems

Rong Zhu et al. ............ 345

Electromechanical Studies on Micro Torsion-Mirror Actuators with Monolithically Integrated Fiber Self-Holding Structures

Wen-Gang Wu et al............. 349

Failure Modes of Doubly Supported Capacitive RF MEMS Switches

Li-Xian Zhang et al. ............ 353

Numerical Simulation of a Bulk Micromachined Relay with Lateral Contact

Zhen-Chuan Yang et al. ........... 357

Failure Mechanisms of a Micro Fabrication Relay

Xiao-Dong Hu et al. ................ 361

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

Ze-Wen Liu et al. ............. 365

Design of a Novel Bulk Micro-machined RF MEMS Switch

    Hai-Xia Zhang et al. ................ 369

Design and Analysis of a Micromachined Capacitive RF Shunt Switch with Composite Membrane

Min Miao et al. ............. 375

Fabrication and Characterization of Nickel Titanium Shape memory Thin Films by RF Magnetron Sputtering for MEMS Applications

F. F. Gong et al. ............ 379

Design and Modeling of a New Thermocouple Structure for Microwave Power Measurements

De-Yong Chen et al. ............ 383

Design of S-band TT&C Transponder for Pico-Satellites

Yi-Bin Xu et al. ........... 387

Comparison Between the System Identification and the Neural Network Methods in Identifying a Model Helicopter’s Yaw Movement

Da-Rong Chen et al. ......... 391

System Identification of a Model Helicopter’s Yaw Movement Based on an Operator’s Control

Hao-Sheng Chen et al. ............ 395

Micro-machined Conformal Silicon Molds for Wafer Bumping and Probing

S. W. Ricky Lee et al. ........... 399

Fabrication and Experimental Results of Lateral Trench Electrode IGBT

Ey Goo Kang et al. ............... 405

Micromachined Multilevel Silicon Structure by Anisotropic Wet Etching

Chen-Kuei Chung et al. .............. 411

Annealing Effect on the Adhesion of Stacked Films for MEMS

Chen-Kuei Chung et al. ............... 415

Measurement of Adhesive Force between Micro Surfaces with a Novel Micro Leverage Structure

Miao Lu et al. ........... 419

The Fabrication of Large Area Si3N4 Membrane Mounted with NiCr/Ni Thermocouples

Jian-Gang Zhang et al. ............ 423

Investigation of Laser-assisted Bonding for MEMS Packaging

Yi Tao et al. ............. 427

Flip Chip Technologies and Their Applications in MEMS Packaging

Hai-Ying Wang et al. .............. 433

Image-Based Calibration for Micromanipulators

    Guang-Yong Li et al. ............... 437

 

Micro & Nano Systems II

Effect of Microchannel on Improving the Photoelectro-chemical Performance of Nanostructured TiO2 Electrodes Sensitized by Ru Complex

   Tingli Ma et al. ............. 445

Surface Finish and Performances of Read/Write Heads by Using Ultra-Fine Diamond

Slurry in Polishing Process

   Jian-Bin Luo et al. ........449

Chemical Mechanical Polishing of Computer Hard Disk Substrate in Colloidal SiO2 Slurry

   Hong Lei et al.     455

Optical Sensing of Volatile Organic Compounds Using Metalloporphyrins Langmuir-Blodgett Films

   Muhamad Mat Salleh et al. ............461

Nanotubes of Conducting Polyaniline and Polypyrrole

   Mei-Xiang Wan et al. ...........465

Molecular Dynamics and Quantum Mechanics Investigation on Mechanic-electric Behaviors of Nanotubes

   Wan-Lin Guo et al. .........469

Fabrication of Nanorollers

   Yu-Jun Zhang et al. ..........473

Positioning Tables for Nanofabrication

Pei-Zhang Yuan et al. .........477

Lubrication Theory for Thin Film Lubrication Accouting for the ordered Film Model

   Chao-Hui Zhang et al. .........481

Nano-microscale Characterizations to Al2O3/SiCnano Ceramic Composites

   Zhong Ling et al. .........487

Study on Mechanical Properties of Nanocrystal Surface Layer of an Aluminum Alloy

   You-Li Ma et al. .........491

The Effects of Experimental Parameters on the Orientation of AlN Nano Films

   Xiao-Hong Xu et al. ...........495

Surface Roughness Effect on the Tensile Strength of Micromachined Polysilicon Films

   Jian-Ning Ding et al. .........499

Electrical Field Induced Effect in Nanocrystalline Gold Film during Deposition

   Chao-Guang Pu et al. ............503

Study of Double-Base Thick Film Ceramic Material

   Meng-Kui Wang ............507

Nanometer Scale Inerfacial Lubrication of PFPE Lubricants Z-DOL and AWA at

Hard Disk Interface

   Wei Wang et al. ............511

Preparation and Tribological Behavior of Perfluoropolyether Lubricant Film on ZrO2 Thin Film

   Jin-Qing Wang et al. ............515

The Initial Sliding Microfriction Properties of Polysilicon Films

   Jian-Ning Ding et al. v 519

Nano-frictional Behaviors on Etched Silicon (100) Surfaces

   Haifei Bao et al. ............523

Fabrication Nano-structure Surface of Si-based Materials and Their Properties

   Jin-Jun Lu et al. ............527

Effects Analysis on the Mechanical Properties of Nanocrystalline Materials

   Yue-Wu Liu et al. ............531

Depth Dependence of Nanohardness in a CuAlNi Single Crystal Shape Memory Alloy

   Cheng Liu et al. ............535

Phase Transformations of Micromachined Polysilicon Films under Nanoindentations

   Jian-Ning Ding et al.            ............539

Theoretical Methods for Nanoindentation

   Ming Li et al. ............543

Theoretical Study on Effect of the Size of Silver Nanoparticles on the localized Surface Plasmon Resonance Spectrum of Silver Nanoparticles Embedded in BaO Thin Film

   Hai Yang et al. ............549

Preparation of Ultra-Fine Calcium Silicate Powders

   Gui-Yu Zeng et al. ............553

Preparation of VOP Ultra-fine Particles by Supercritical Fluid Drying

   Ling Zeng et al. ............557

Simulation, Characterization & Modeling

Lyapunov Exponents of a Micro Chaotic Mixer

         Yi-Kuen Lee ............561

The Pumping Effect of Traveling Phase Transition in Microtubes

Mo-Ran Wang et al. ............565

Fiber Ring Laser Intra-cavity Absorption Spectroscopy for Gas Sensing

    M. Zhang et al. ............569

Discussion about the Similarity of Micro-scale Gas Flows

Feng-Hua Qin et al. ............573

Proceeding of Experiments about Liquid Flow through Microtubes

Zhan-Hua Li et al. ............577

Characteristics of the Localized Interface Optical-phonon Modes in Triple-constitution Superlattices with Defect Layers

         Ben-Yuan Gu et al. ............581

The Simulation on the Microelectromechanical Tunable F-P Optical Filter

Hao Feng et al. ............585

Topology Optimization for Stable Non-linear Structures

         Zhen-Yu Liu et al. ............ 589

Improvement of Micro End Milling Tools through Variation of Tool Manufacturing Method and Geometry

J. Schmidt et al. ............595

A Model of Computation of Elastic and Plastic Contact Considering Adhesion Effect

         Qun-Yang Li et al. ............599

Characterization and Modeling of a Curved Electrostatic Actuator

Su-Yan Liu et al. ............603

Method for Reducing Reactive Ion Etching Lag in MEMS Process

Chen-Kuei Chung et al. ............609

Relative Importance of Natural Convection and Surface Radiation in a Square Enclosure

Na Li et al. ............ 613

Characterization of Electronic Transients by an Ultrafast Scanning Tunneling Microscope

Tian Lan et al. ............ 617

Simulation of Contact Interaction of Nanometer Objects Pushing Using AFM Cantilever as Manipulator

Xiao-Peng Yu et al. ............621

Optical Module for a Near-Field Hybrid Recording System Using the Diffractive Optical Element (DOE)

Jian-Shian Lin et al. ............627

M-Test Method for Measuring Mechanical Property of Multi-layer in MEMS

Yan-Feng Jiang et al. ............631

Rotor Manipulation Mechanism for Micro Unmanned Helicopter

Jun-Gang Lü et al. ............ 635

Mechanical Model of Laterally Driven Polysilicon Microresonant

Xiao-Yang Chen et al. ............639

 

Microstructure, Mechanical and Magnetic Properties of FeTiN Thin Films by IBAD

Ji Zhang et al. ............643

Micromechanical Characterization of TiN Films on 9Cr18 Steels

Tai-Hua Zhang et al. ............649

Deformation Measurement of a Small Component and a Thin Film Using Time Sequence Speckle Pattern Interferometry

Xi-De Li et al. ............653

Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films

Jian-Ning Ding et al. ............657

Properties and Structure of High Coercivity Sm (Co, Al, Si) /Cr Sputtered Thin Films

Xiang Wang et al. ............661

Reliability of Electrostatic MEMS: Charge Accumulation in Dielectric Layer

Xu-Yuan Chen et al.           665

Electrical Properties of Multilayer-chip ZnO Varistors

Xue-Ya Kang et al. ............671

Electrical Properties of Boron and Phosphorus Doped Polycrystalline Silicon Germanium Films

Liang Dong et al. ............677

Study of Fracture Behavior of Piezoelectric Ceramics with Defects

Zhen-Ke Zhang et al. ............681

Onset of Adiabatic Shear Instability in Strain Gradient Dependent Metal Matrix Composites

L.-H. Dai et al. ............685

Crack Tip Fields with Strain Gradient Effects

S.-H. Chen et al. ............689

3D Simulation of the Micro Indentation Process and Relative Problems Research

Min Li et al. ............695

Size Effects in Micro-bending Deformation of MEMS Devices Based on the Discrete Dislocation Theory

Shan Tang et al. ............699

Reflection of Magneto-thermoelastic Waves under Thermoelasticity without Energy Dissipation

Ya-Qin Song et al. ............703

Morphological Dynamic Simulation of Cluster of Atoms Deposition Process

Jenn-Sen Lin et al. ............707

Atomic Stick-slip Friction between Commensurate Self-assembled Monolayers

Tao Zhang et al. ............713

Freezing Atom Method in Molecular Dynamics Simulation

Wan-Lin Guo et al. ............717

The Infrared Absorption’s Phonon Model of the Nanometer Powder

Ying-tang Zhang ............721

The Inner Pressure of the Atoms in a Solid in Refined TFD Theory

    Ru-Zeng Zhu et al. ............723

Analysis of Residual Stress Gradient in MEMS Multi-layer Structure

Jin Qian et al. ............727

 
Late Papers and Abstracts

 

Fabrication, Characterization and Property of Aligned Multi –walled Carbon nanotubes

S. S. Xie et al. ............731

Nanostructuring Based on Scanning Probe Microscopy and Bottom Up Assembly for Future Nanoelectronic Devices

         Zhongfan Liu ............733

Intrinsic Vibration of Multiwalled Carbon Nanotubes

         C.Q. Ru ............735

Paths Linking Micro and Nano Sciences and Technologies

         Chih-Ming Ho ............737

Integrated Micro/Nano Fluidics for Mass-spectrometry Protein Analysis

         Yu-Chong Tai et al. ............739

Autonomous Multi-robot Sensor-Based Cooperation for Nanomedicine

         Adriano Cavalcanti et al. ............743

Surface Functionalisation, Orientation, Conformation and Positioning of Macromolecules at the Nanometer Scale

         Sven Oscarsson ............747

Advances in Quantum Computing and Control

         Tzyh-Jong Tarn ............751

Fabrication and Property Analysis of MWNT Junctions through Nanorobotic Manipulations

         Toshio Fukuda et al. ............753

Applications of Oriented Batch-CNT

         Yao Cheng et al. ............759

Fabrication of Submicro Channels in Quartz Cubes Using Laser-induced Splitting

         S.J. Qin et al............763

Dependence of AC Electrophoresis Carbon Nanotube Manipulation on Microelectrode Geometry

         Victor T.S. Wong et al. ............769

A Polymer-based Micro Thermal Actuator for Micromanipulations in Aqueous Environment

         Ho-Yin Chan et al. ............775

Simulation of Thin Metal Film Bonding for MEMS Applications Inside a Microwave Cavity

         Jason Clendenin et al. ............779

Morphology Correlation to the Superhydrophobicity in an Organic Thin Film on Rough Al

         Sili Ren et al. ............785

Fabrication of an Electrothermally Actuated Electrostatic Microgripper

         Sang H. Lee et al. ............789